The UVLED degumming machine is a light source curing equipment that cures the surface of the UV cutting film tape to complete the automatic degumming of the wafer chip. It is a cold light source LED ultraviolet degumming curing lamp. The standard product of UV debonding machine is 365nm ultraviolet curing equipment, which is mainly used in the production and processing of semiconductor chips. Before chip scribing, the wafer needs to be fixed on the frame with dicing film. After the wafer processing process, it is necessary to use an ultraviolet light source to irradiate the fixed dicing film to complete the curing of the UV glue on the film, which is convenient for wafer slicing for subsequent packaging processes.
I. Equipment features
1, the equipment has nitrogen mode and non-nitrogen mode curing function, non-nitrogen mode: can choose automatic or manual mode, automatic mode, by the door access sensor control UVLED switch; manual mode, by the touch screen control UVLED switch.
2, nitrogen mode: after closing the door, click on the start button to start filling nitrogen, when the filling time and the air pressure in the cavity reaches the set value, the UVLED begins to irradiate and timing, after the irradiation time, automatically turn off the UVLED and open the exhaust valve, wait until the exhaust is complete before opening the safety door.
3、The equipment supports nitrogen filling interface, adjustable nitrogen filling time and pressure, real-time detection of air pressure inside the cavity and over-pressure protection. 4、Equipment with digital dimming, production counting, historical data query and other functions.
II. Light source characteristics
1、Efficient and energy-saving
UVLED output wavelength concentration, high photoelectric conversion rate, energy saving and power saving, fast curing speed, high production efficiency.
2、Wide range of application
UVLED is a cold light source, low infrared heat radiation, will not cause thermal stress and deformation of the work, suitable for all types of heat-sensitive materials curing.
UVLED has a long service life, reducing the investment cost of equipment. It can be switched on and off without preheating, and the number of switching times does not affect the service life.
4、Green and environmental protection
RoHS compliant, mercury free.